Brush mandrel for pva sponge brush

ABSTRACT

A cleaning device for cleaning substrates is provided. The cleaning device includes a generally cylindrically-shaped brush mandrel and a cylindrical brush. The brush mandrel has a body section with an outer surface positioned about a central axis. The outer surface is interrupted by an engagement member having primary features adjacent secondary features. The brush has a hollow bore formed around the brush mandrel with an inner surface interrupted by a second engagement member which mates the first engagement member. The primary features flow in a direction generally perpendicular to a rotational direction of the brush mandrel around the central axis and include a first surface which is generally perpendicular to the outer surface. The secondary features include a second surface which flows in a direction generally perpendicular to the first surface and along the central axis. No primary feature includes a radially obstructing feature formed over any secondary feature.

CROSS-REFERENCES TO RELATED APPLICATIONS

The Present Application is a divisional of U.S. patent application Ser.No. 13/464,810, filed May 4, 2012, which claims the benefit of priorityfrom U.S. Provisional Patent Application No. 61/494,786, filed Jun. 8,2011, and U.S. Design Patent Application 29/393,743, filed Jun. 8, 2011,the contents of all of which are hereby incorporated herein by referencein their entirety to the extent permitted by law.

FIELD OF THE INVENTION

The present invention relates generally to processes and devices forcleaning articles. More specifically, it relates to a brush mandrel forretaining a brush used for cleaning semiconductor substrates.

BACKGROUND

Cast cylindrical polyvinyl alcohol brushes are conventionally used inautomatic cleaning systems to provide a post CMP (Chemical MechanicalPlanarization) process to effectively clean surfaces of substrates suchas semiconductor wafers or other disc-shaped substrates. Cylindricalpolyvinyl alcohol brushes are also used in cleaning systems to clean anddry glass and other non-disc-shaped substrates in flat panel displaymanufacture, glass production, and printed circuit board assembly.Cylindrical brushes preferably have a length as short as 50 millimetersor as long as 10 meters, for example.

The cylindrical brushes are located on and driven by a central brushmandrel in the cleaning process. An accurate and stable connectionbetween the cylindrical brush and the central brush mandrel isdesirable. The cylindrical brushes may have nodules on their outersurface to help clean the substrate.

The cylindrical brushes are expected to accurately rotate on their axisand provide a generally cylindrical surface with a generally consistentnodule pressure pattern over their useful life, which defines optimumcleaning of the entire substrate surface in the least amount of timewith minimal damage to the substrate surface.

In some cases, the cylindrical brush is formed around the central brushmandrel. For example, the brush mandrel may be placed in a mold and amixture of chemicals, such as polyvinyl alcohol, is injected into themold to form the cylindrical brush around the central brush mandrel.With reference to FIGS. 1A and 1B, in previous brush mandrel designs, abrush mandrel 30 may include a plurality of odd shaped nooks, cracks,and crevices 52 formed on an outer surface 54 of the brush mandrel 30 tobetter engage and hold the cylindrical brush. As the cylindrical brush110 is formed around the brush mandrel 30, gas bubbles may get trappedin the crevices 52 and either remain in the crevices 52 or rise and betrapped within the cylindrical brush 110 as the cylindrical brush 110 isforming. The trapped gas bubbles form defects in the cylindrical brush110 which prevent the cylindrical brush 110 from performing as designed.

Additionally, at times, over the life of the cylindrical brush, therewill typically be a tendency for the brush to move axially orrotationally by partially slipping on the brush mandrel and this isregarded as unsatisfactory performance. As a result, it would bedesirable to have a brush mandrel which can provide an accurate andstable connection between the cylindrical brush and the central brushmandrel and which can prevent gas bubbles from forming or being trappedin the cylindrical brush.

SUMMARY

In one aspect, a cleaning device for cleaning substrates is provided.The cleaning device includes, but is not limited to, a generallycylindrically-shaped brush mandrel and a cylindrical brush. The brushmandrel has a body section with an outer surface positioned about acentral axis. The outer surface is interrupted by a first engagementmember having a primary feature adjacent a secondary feature. Thecylindrical brush has a hollow bore formed around the brush mandrel. Thehollow bore has an inner surface interrupted by a second engagementmember which mates with and surrounds the first engagement member of thebrush mandrel. The primary feature is a first surface which flows in adirection generally perpendicular to a rotational direction of the brushmandrel around the central axis in order to prevent rotational movementof the cylindrical brush with respect to the brush mandrel. Thesecondary feature is a second surface which flows in a directiongenerally perpendicular to the first surface and along the central axis.The second surface has a first portion which is closer to the centralaxis and a second portion which is further away from the central axisthan the first portion in order to prevent axial movement of thecylindrical brush with respect to the brush mandrel.

In one aspect, a cleaning device for cleaning substrates is provided.The cleaning device includes, but is not limited to, a generallycylindrically-shaped brush mandrel and a cylindrical brush. The brushmandrel has a body section with an outer surface positionedsymmetrically about a central axis. The outer surface is interrupted byan engagement member having primary features adjacent secondaryfeatures. The cylindrical brush has a hollow bore formed around thebrush mandrel. The hollow bore has an inner surface interrupted by asecond engagement member which mates with and surrounds the firstengagement member of the brush mandrel. The primary features flow in adirection generally perpendicular to a rotational direction of the brushmandrel around the central axis and include a first surface which isgenerally perpendicular to the outer surface. The secondary featuresinclude a second surface which flows in a direction generallyperpendicular to the first surface and along the central axis. Noprimary feature includes a radially obstructing feature formed over anysecondary feature.

In one aspect, a method for cleaning substrates is provided. The methodincludes, but is not limited to, engaging a substrate with a cleaningdevice having a generally cylindrical brush with a hollow bore formedaround a brush mandrel with an outer surface wrapped around a centralaxis. The outer surface is interrupted by a first engagement memberhaving primary features adjacent secondary features. The cylindricalbrush has a hollow bore formed around the brush mandrel. The hollow borehas an inner surface interrupted by a second engagement member whichmates with and surrounds the first engagement member of the brushmandrel. The primary features flow in a direction generallyperpendicular to a rotational direction of the brush mandrel around thecentral axis and include a first surface which is generallyperpendicular to the outer surface. The secondary features include asecond surface which flows in a direction generally perpendicular to thefirst surface and along the central axis. No primary feature includes aradially obstructing feature formed over any secondary feature.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention can be better understood with reference to the followingdrawings and description. The components in the figures are notnecessarily to scale, emphasis instead being placed upon illustratingthe principles of the invention.

FIGS. 1A-1B depict various views of a previous brush and mandrelcombination.

FIGS. 2A-2H depict various views of a brush and brush mandrel, inaccordance with one embodiment of the present invention.

FIG. 3 depicts a perspective view of a cleaning system for cleaning andpolishing substrates, in accordance with one embodiment of the presentinvention.

DETAILED DESCRIPTION

Methods and systems consistent with the present invention overcome thedisadvantages of conventional brushes and brush-mandrel systems byreducing rotational and axial slippage of the brush and by minimizingthe formation of unwanted gas bubbles in the brush. In particular, acylindrical brush is formed around a brush mandrel having an outersurface interrupted by a first engagement member having primary andsecondary features, whereby no primary feature includes a radiallyobstructing feature formed over any secondary feature, therebypreventing the trapping of any gas bubbles in first engagement member,or the brush, when forming the brush around the brush mandrel.

Referring to FIG. 3, there is shown a cleaning system 100 for cleaningand polishing substrates 104. Preferably, the cleaning system 100 is anautomatic cleaning system which can automatically or manually be set topolish and/or clean a substrate 104, and more particularly a surface 106of the substrate 104. Substrate 104 includes any one of a variety ofdisc-shaped or non-disc-shaped substrates, such as: silicon basedsubstrates including glass, dry glass, semiconductor wafers, flat paneldisplay glass panels, glass production panels, and printed circuitboards; polymer-based substrates; and various types of semiconductorsubstrates such as silicon-based semiconductor substrates, singleelement semiconductor substrates, silicon on insulator (SOI) substrates,III-V semiconductor substrates, II-VI semiconductor substrates, otherbinary semiconductor substrates, ternary semiconductor substrates,quaternary semiconductor substrates; fiber optic substrates;superconducting substrates; glass substrates; fused quartz substrates;fused silica substrates; epitaxial silicon substrates; and organicsemiconductor substrates.

Referring to FIGS. 2A-2G and FIG. 3, cleaning system 100 includes agenerally cylindrical brush 110 having a hollow bore 112, a brushmandrel 130 engaging the brush 110 within the hollow bore 112, and arotational device 102 engaging the brush mandrel 130. The cylindricalbrush 110 may be any brush which is or may be conventionally used in anautomatic cleaning system to provide a post chemical mechanicalplanarization (CMP) process to effectively clean the surface 106 ofsubstrate 104, such as a cast cylindrical polyvinyl alcohol (PVA) foambrush, a polyurethane foam brush, or other polymeric foam brush.

Referring to FIG. 2H, cylindrical brush 110 includes an outer cleaningsurface 114 opposed to an inner surface 113, forming the hollow bore112, and interrupted by a second engagement member 116. The hollow bore112 is formed around the brush mandrel 130, preferably by injectionmolding the brush 110 around an already formed brush mandrel 130. Thehollow bore 112 is defined by the inner surface 113 of the cylindricalbrush 110. The inner surface 113 is interrupted by a second engagementmember 116 which mates with and surrounds the first engagement member140 of the brush mandrel 130, since the second engagement member 116 isformed around the first engagement member 140.

Second engagement member 116 defines the contour of hollow bore 112 andmates with and surrounds a first engagement member 140 of the brushmandrel 130. Referring to FIG. 2B, along a cross-section of secondengagement member 116, along a line A-A which is perpendicular to arotational axis a₁ of the brush mandrel 130, defines the contour ofhollow bore 112. By forming the second engagement member 116 around thefirst engagement member 140, the brush 110 is securely fitted to thebrush mandrel 130 in order to prevent slippage and movement between thebrush mandrel 130 and the brush 110.

Outer cleaning surface 114 may be generally smooth, as shown in FIG. 3,or outer cleaning surface 114 may have nodules 118 with channels 120formed between the nodules 118, as shown in FIG. 1B. Having nodules 118with channels 120 may help brush 110 to better clean certain substrates104. Surface features on the outer cleaning surface 114, such aschannels 120, lines, edges, points, or other raised surfaces or nodules118, may be incorporated and have a beneficial effect at increasingtorque transmission levels but may be limited due to their effect onouter cleaning surface 114 geometry changes and also on the difficultyof forming the brush 110 on the brush mandrel 130.

Referring to FIG. 3 and FIGS. 2A-2G, the brush mandrel 130 engages thebrush 110 within the hollow bore 112. The brush mandrel 130 includes abody section 132 which forms an outer surface 133 which engages and issecured to the inner surface 113 defining the hollow bore 112 of thebrush 110.

Preferably, the brush mandrel 130 is generally cylindrically-shaped. Asdefined herein, a generally cylindrically-shaped member, such as thebrush mandrel 130, is a member which is formed around a longitudinalcentral axis a₁, and which is preferably balanced around the centralaxis a₁ in such a way that the centrifugal forces generated by themember as the member rotates around the central axis a₁ vary by no morethan ±20%, providing for a relatively balanced brush mandrel 130. As aresult, the brush mandrel 130 does not have to have a perfectlycylindrical outer surface 133, but can have interruptions, such as firstengagement members 140, in its outer surface 133.

With reference to FIG. 2D, preferably, the outer surface 133 ispositioned about a central axis a₁ of the brush mandrel 130, and morepreferably, the outer surface 133 is positioned symmetrically about acentral axis a₁ of the brush mandrel 130. In order to prevent rotationalmovement, and preferably axial movement, between the brush 110 and thebrush mandrel 130, the profile or contour of the outer surface 133 maybe interrupted by a first engagement member 140. Rotational movement isdefined herein as movement along a rotational direction α about therotational axis a₁, as shown in FIG. 2H. Axial movement is definedherein as movement along an axial direction γ which is generallyperpendicular to, within ±30° of, the rotational axis a₁. Firstengagement member 140 is any feature which interrupts the generalcontour of outer surface 133 in order to better engage the secondengagement member 116 of the brush 110. First engagement member 140includes such features as a band or a series of bands, a ridge or seriesof ridges, or a channel 174 or a series of channels 174 at any number oflocations along the outer surface 133 to effectively axially secure thebrush 110 to the brush mandrel 130, as shown in FIGS. 2A-2G and 3.

In one embodiment, the first engagement member includes a channel 174,or a series of channels 174 which extend along a length of the brushmandrel 130, in a direction which is preferably generally parallel to,within ±30°, of the rotational axis a₁ of the brush mandrel 130, asshown in FIGS. 2A and 2B. However, channels 174 may wrap around thebrush mandrel 130 in a direction which is preferably generallyperpendicular to, within ±30° of, the rotational axis a₁ of the brushmandrel 130 and generally parallel to, within ±30° of, the rotationaldirection α of the brush mandrel 130. In one embodiment, the channels174 are wrapped around the brush mandrel 130 in a spiral pattern.

With reference to FIGS. 2A and 2G, preferably, the first engagementmember 140 has a primary feature 170 adjacent a secondary feature 180.Preferably, the primary feature 170 includes a first surface 172 whichflows in a direction generally perpendicular to, within ±30° of, therotational direction α of the brush mandrel 130 around the central axisa₁ and from the outer surface 133 and in towards the central axis a₁, inorder to prevent rotational movement of the cylindrical brush 110 withrespect to the brush mandrel 130. Preferably, the first surface formsside walls of channel 174.

Preferably, the secondary feature 180 is a second surface 182 whichflows in a direction generally perpendicular to, within ±30° of, thefirst surface 172 and along the central axis a₁. Preferably, the secondsurface 182 is also generally parallel to, within ±60° of, the outersurface 133. Preferably, the second surface 182 has a first portion 184which is closer to the central axis a₁ and a second portion 186 which isfurther away from the central axis a₁ than the first portion 184 inorder to prevent axial movement of the cylindrical brush 110 withrespect to the brush mandrel 130. Preferably, there is a smoothtransition between the first and second portions 184, 186, withpreferably, no sharp edges or corners, in order to prevent the trappingof gas bubbles 192 in the channel 174, or the brush 110, when formingthe cylindrical brush 110 around the brush mandrel 130. Preferably, thesmooth transition is a series of curved hills and valleys, as shown inFIG. 2A.

Preferably, the channel 174 starts at a first end 175 and ending at asecond end 176, and the secondary feature 180 is a curved surface 182 atthe bottom of the channel 174 having a first curved taper 177 at thefirst end 175 of the channel 174 and a second curved taper 178 at thesecond end 176 of the channel 174. The first and second tapers 177, 178along with the curved surface 182, help to prevent the trapping of gasbubbles 192 in the channel 174, or the brush 110, when forming thecylindrical brush 110 around the brush mandrel 130, since there are lesssharp edges or corners for the gas bubbles 192 to get trapped in or on.

Preferably, the primary feature 170, and preferably the first surface172, which preferably surrounds and is adjacent to the secondary feature180, includes no radially obstructing features formed over the secondaryfeature 180. A radially obstructing feature is any feature formed overthe secondary feature 180, that when drawing a straight line from apoint on the surface 182 of the secondary feature 180 and through anopening 190 formed at the outer surface 133, that the straight line doesnot pass through or touch any part of the primary feature 170. In thismanner, no portion of the primary feature 170 would obstruct or preventa gas bubble 192 from exiting the in the channel 174 when forming thecylindrical brush 110 around the brush mandrel 130.

With reference to FIGS. 2D and 2E, preferably, pores 156 are formed fromthe outer surface 133 of the body section 132 to a fluid channel 150 forflowing polishing fluid from the fluid channel 150 to the outer surface133 of the body section 132 and to the brush 110 through channels 158.

As a result of first and second engagement members 140, 116, thephysical fit between the outer surface 133 of the brush mandrel 130 andthe inner surface 113 of the brush 110 provides significant resistanceto slipping. This resistance to slipping could be further enhanced byother methods including adhesives, surface preparation of the mandrel(chemical, physical, corona, and the like), or such additional surfacefeatures as knurls, sharp edges, hooks, points, keys, or other linkingfeatures.

Referring to FIGS. 2E, 2F, and 3, in one embodiment the brush mandrel130 also includes rotational engagement members 160, 162 for engagingand connecting with a rotational device 102. The rotational engagementmembers 160, 162 are any device which can be used to connect with orfasten to another device, and includes things such as a nut-shaped piecethat is integrally formed with the brush mandrel 130 and can be fastenedto the rotational device 102. The rotational device 102 includes anydevice which can induce a rotational movement onto the brush mandrel130, such as an electrical motor, a gas motor or engine, a crank shaftpower by a motor or manually powered, and any combination of pulleys,wheels, mechanical linkages, and/or gears moved automatically ormanually. The rotational device 102 has a complimentary engagementmember which connects with the rotational engagement members 160, 162for engaging and connecting the brush mandrel 130 with the rotationaldevice 102.

In operation, the brush 110 is formed around the brush mandrel 130,preferably by injection molding the brush 110 around the brush mandrel130. Upon forming the brush 110 around the brush mandrel 130, the brushmandrel 130 and the brush 110 are then connected with the rotationaldevice 102 by connecting the rotational engagement member 160 with anengagement member on connecting with the rotational device 102. Then,the brush 110 is rotated along the rotational direction α about therotational axis a₁. While rotating the brush 110, or before rotating thebrush 110, the brush 110 is placed near and engages the surface 106 ofthe substrate 104. The rotational motion of the brush 110 on the surface106 helps to clean and/or polish the surface 106. Referring to FIG. 3,in one embodiment, the substrate 104 is also rotated along a rotationaldirection γ about a rotational axis a₂. In one embodiment, polishingfluid is pumped through fluid channel 150 formed in the body section 132and into the brush 110 through pores 156 formed through the outersurface 133 of the body section 132 and to the fluid channel 150. Thepolishing fluid helps to further clean and/or polish the substrate 104.

Although the illustrative examples above describe cylindrical PVAbrushes 110 used to clean semiconductor substrates 104, one having skillin the art will appreciate that methods and systems consistent with thepresent invention are not limited thereto. For example, the brush 110may include other materials and may be used to clean other types ofsurfaces 106 or substrates 104. Further, the brush 110 is not limited tohaving a cylindrical shape, but may have any shape or configuration.

The Abstract of the Disclosure is provided to allow the reader toquickly ascertain the nature of the technical disclosure. It issubmitted with the understanding that it will not be used to interpretor limit the scope or meaning of the claims. In addition, in theforegoing Detailed Description, it can be seen that various features aregrouped together in various embodiments for the purpose of streamliningthe disclosure. This method of disclosure is not to be interpreted asreflecting an intention that the claimed embodiments require morefeatures than are expressly recited in each claim. Rather, as thefollowing claims reflect, inventive subject matter lies in less than allfeatures of a single disclosed embodiment. Thus the following claims arehereby incorporated into the Detailed Description, with each claimstanding on its own as a separately claimed subject matter.

While various embodiments of the invention have been described, it willbe apparent to those of ordinary skill in the art that other embodimentsand implementations are possible within the scope of the invention.Accordingly, the invention is not to be restricted except in light ofthe attached claims and their equivalents.

1. A method for cleaning substrates, the method comprising: engaging asubstrate with a cleaning device having a generally cylindrical brushwith a hollow bore formed around a brush mandrel with an outer surfacewrapped around a central axis, wherein the outer surface is interruptedby a first engagement member having primary features adjacent secondaryfeatures, wherein the cylindrical brush has a hollow bore formed aroundthe brush mandrel, the hollow bore having an inner surface interruptedby a second engagement member which mates with and surrounds the firstengagement member of the brush mandrel, wherein the primary featuresflow in a direction generally perpendicular to a rotational direction ofthe brush mandrel around the central axis and include a first surfacewhich is generally perpendicular to the outer surface, wherein thesecondary features include a second surface which flows in a directiongenerally perpendicular to the first surface and along the central axis,and wherein no primary feature includes a radially obstructing featureformed over any secondary feature.
 2. The method of claim 1, wherein thesecond surface has a first portion which is closer to the central axisand a second portion which is further away from the central axis thanthe first portions in order to prevent axial movement of the cylindricalbrush with respect to the brush mandrel.
 3. The method of claim 1,wherein the primary feature is a channel starting at a first end andending at a second end, and wherein the secondary feature is a curvedsurface at the bottom of the channel having a first curved taper at thefirst end of the channel and a second curved taper at the second end ofthe channel.
 4. The method of claim 1, wherein the body section forms afluid channel for receiving fluid along the central axis of the bodysection, and wherein the body section forms a pore from the outersurface of the body section to the fluid channel for flowing fluid fromthe fluid channel to the outer surface of the body section.
 5. Themethod of claim 1, further comprising a rotational engagement memberconnected with the brush mandrel for engaging a rotational device. 6.The method of claim 1, wherein the cylindrical brush has a plurality ofnodules on an outer surface of the cylindrical brush.